00488nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002300092245003900115260003200154300002000186490003300206856010300239IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819492609 (Print)  cIIA Library  aAbboud, Frank, ed. 0aPhotomask Technology 2012h[eBook]  aWashington, USAbSPIEc2012  aOnline resource  aProceedings of SPIE; V. 8522  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/8522yClick Here to Access eBook