TY  - BOOK
AU  - Maurer, Wilhelm, ed.
TI  - Photomask Technology 2011
T2  - Proceedings of SPIE; V. 8166
SN  - 9780819487919 (Print)
PY  - 2011///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/8166
ER  -