@book{30789,
	author = {Maurer, Wilhelm, ed.},
	title = {Photomask Technology 2011},
	publisher = {SPIE},
	year = {2011},
	series = {Proceedings of SPIE; V. 8166},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/8166}
}