TY  - BOOK
AU  - Montgomery, Warren, ed.
TI  - Photomask Technology 2010
T2  - Proceedings of SPIE; V. 7823
SN  - 9780819483379 (Print)
PY  - 2010///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7823
ER  -