@book{30788,
	author = {Montgomery, Warren, ed.},
	title = {Photomask Technology 2010},
	publisher = {SPIE},
	year = {2010},
	series = {Proceedings of SPIE; V. 7823},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7823}
}