TY  - BOOK
AU  - Zurbrick, Larry, ed.
TI  - Photomask Technology 2009
T2  - Proceedings of SPIE; V. 7488
SN  - 9780819477958 (Print)
PY  - 2009///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7488
ER  -