00490nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002500092245003900117260003200156300002000188490003300208856010300241IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819477958 (Print)  cIIA Library  aZurbrick, Larry, ed. 0aPhotomask Technology 2009h[eBook]  aWashington, USAbSPIEc2009  aOnline resource  aProceedings of SPIE; V. 7488  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/7488yClick Here to Access eBook