@book{30787,
	author = {Zurbrick, Larry, ed.},
	title = {Photomask Technology 2009},
	publisher = {SPIE},
	year = {2009},
	series = {Proceedings of SPIE; V. 7488},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7488}
}