00724nam a2200181Ia 4500003000900000008004100009020002600050040001600076100003500092245003900127260003200166300002000198490003300218856010300251942000700354999001700361952016400378IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819473554 (Print)  cIIA Library  aKawahira, Hiroichi, ed.946968 0aPhotomask Technology 2008h[eBook]  aWashington, USAbSPIEc2008  aOnline resource  aProceedings of SPIE; V. 7122  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/7122yClick Here to Access eBook  cEB  c30786d30786  00104070aBANbBANd2011-07-01eSPIEhV. 7122l0pEB10246r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/7122w2021-11-05yEB