TY  - BOOK
AU  - Kawahira, Hiroichi, ed.
TI  - Photomask Technology 2008
T2  - Proceedings of SPIE; V. 7122
SN  - 9780819473554 (Print)
PY  - 2008///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7122
ER  -