@book{30786,
	author = {Kawahira, Hiroichi, ed.},
	title = {Photomask Technology 2008},
	publisher = {SPIE},
	year = {2008},
	series = {Proceedings of SPIE; V. 7122},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7122}
}