00485nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002000092245003900112260003200151300002000183490003300203856010300236IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819468871 (Print)  cIIA Library  aNaber, Bob, ed. 0aPhotomask Technology 2007h[eBook]  aWashington, USAbSPIEc2007  aOnline resource  aProceedings of SPIE; V. 6730  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/6730yClick Here to Access eBook