@book{30785,
	author = {Naber, Bob, ed.},
	title = {Photomask Technology 2007},
	publisher = {SPIE},
	year = {2007},
	series = {Proceedings of SPIE; V. 6730},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/6730}
}