@book{30784,
	author = {Martin, Patrick, ed.},
	title = {Photomask Technology 2006},
	publisher = {SPIE},
	year = {2006},
	series = {Proceedings of SPIE; V. 6349},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/6349}
}