TY  - BOOK
AU  - Buck, Peter, ed.
TI  - Photomask Technology
T2  - Proceedings of SPIE; V. 10451
SN  - 9781510613768 (Print)
PY  - 2017///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10451
ER  -