@book{30782,
	author = {Ando, Akihiko, ed.},
	title = {Photomask Japan 2019: XXVI Symposium on Photomask and Next-Generation Lithography Mask Technology},
	publisher = {SPIE},
	year = {2019},
	series = {Proceedings of SPIE; V. 11178},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/11178}
}