@book{30781,
	author = {Takehisa, Kiwamu, ed.},
	title = {Photomask Japan 2018: XXV Symposium on Photomask and Next-Generation Lithography Mask Technology},
	publisher = {SPIE},
	year = {2018},
	series = {Proceedings of SPIE; V. 10807},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10807}
}