@book{30779,
	author = {Yoshioka, Nobuyuki, ed.},
	title = {Photomask Japan 2016: XXIII Symposium on Photomask and Next-Generation Lithography Mask Technology},
	publisher = {SPIE},
	year = {2016},
	series = {Proceedings of SPIE; V. 9984},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/9984}
}