TY  - BOOK
AU  - Morimoto, Hiroaki, ed.
TI  - Photomask and X-Ray Mask Technology VI
T2  - Proceedings of SPIE; V. 3748
SN  - 9780819432308 (Print)
PY  - 1999///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3748
ER  -