00505nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002700092245005200119260003200171300002000203490003300223856010300256IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819432308 (Print)  cIIA Library  aMorimoto, Hiroaki, ed. 0aPhotomask and X-Ray Mask Technology VIh[eBook]  aWashington, USAbSPIEc1999  aOnline resource  aProceedings of SPIE; V. 3748  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/3748yClick Here to Access eBook