@book{30777,
	author = {Morimoto, Hiroaki, ed.},
	title = {Photomask and X-Ray Mask Technology VI},
	publisher = {SPIE},
	year = {1999},
	series = {Proceedings of SPIE; V. 3748},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3748}
}