TY  - BOOK
AU  - Aizaki, Naoaki, ed.
TI  - Photomask and X-Ray Mask Technology V
T2  - Proceedings of SPIE; V. 3412
SN  - 9780819428646 (Print)
PY  - 1998///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3412
ER  -