TY  - BOOK
AU  - Aizaki, Naoaki, ed.
TI  - Photomask and X-Ray Mask Technology IV
T2  - Proceedings of SPIE; V. 3096
SN  - 9780819425164 (Print)
PY  - 1997///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3096
ER  -