@book{30775,
	author = {Aizaki, Naoaki, ed.},
	title = {Photomask and X-Ray Mask Technology IV},
	publisher = {SPIE},
	year = {1997},
	series = {Proceedings of SPIE; V. 3096},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3096}
}