TY  - BOOK
AU  - Yoshihara, Hideo, ed.
TI  - Photomask and X-Ray Mask Technology III
T2  - Proceedings of SPIE; V. 2793
SN  - 9780819421791 (Print)
PY  - 1996///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/2793
ER  -