@book{30774,
	author = {Yoshihara, Hideo, ed.},
	title = {Photomask and X-Ray Mask Technology III},
	publisher = {SPIE},
	year = {1996},
	series = {Proceedings of SPIE; V. 2793},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/2793}
}