TY  - BOOK
AU  - Yoshihara, Hideo, ed.
TI  - Photomask and X-Ray Mask Technology II
T2  - Proceedings of SPIE; V. 2512
SN  - 9780819418708 (Print)
PY  - 1995///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/2512
ER  -