TY  - BOOK
AU  - Yoshihara, Hideo, ed.
TI  - Photomask and X-Ray Mask Technology
T2  - Proceedings of SPIE; V. 2254
SN  - 9780819415639 (Print)
PY  - 1994///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/2254
ER  -