@book{30772,
	author = {Yoshihara, Hideo, ed.},
	title = {Photomask and X-Ray Mask Technology},
	publisher = {SPIE},
	year = {1994},
	series = {Proceedings of SPIE; V. 2254},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/2254}
}