00523nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002200092245007500114260003200189300002000221490003300241856010300274IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781628413236 (Print)  cIIA Library  aKato, Kokoro, ed. 0aPhotomask and Next-Generation Lithography Mask Technology XXIh[eBook]  aWashington, USAbSPIEc2014  aOnline resource  aProceedings of SPIE; V. 9256  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/9256yClick Here to Access eBook