00522nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002200092245007400114260003200188300002000220490003300240856010300273IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819494917 (Print)  cIIA Library  aKato, Kokoro, ed. 0aPhotomask and Next-Generation Lithography Mask Technology XXh[eBook]  aWashington, USAbSPIEc2013  aOnline resource  aProceedings of SPIE; V. 8701  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/8701yClick Here to Access eBook