Kato, Kokoro, ed. <br/><br/>
Photomask and Next-Generation Lithography Mask Technology XX  [eBook] 

 - Washington, USA  SPIE  2013 
 - Online resource 
 - Proceedings of SPIE; V. 8701 .
<br/><br/><label>ISBN: </label>9780819494917 (Print)