00528nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002500092245007700117260003200194300002000226490003300246856010300279IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819486738 (Print)  cIIA Library  aKonishi, Toshio, ed. 0aPhotomask and Next-Generation Lithography Mask Technology XVIIIh[eBook]  aWashington, USAbSPIEc2011  aOnline resource  aProceedings of SPIE; V. 8081  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/8081yClick Here to Access eBook