00528nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002600092245007600118260003200194300002000226490003300246856010300279IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819482389 (Print)  cIIA Library  aHosono, Kunihiro, ed. 0aPhotomask and Next-Generation Lithography Mask Technology XVIIh[eBook]  aWashington, USAbSPIEc2010  aOnline resource  aProceedings of SPIE; V. 7748  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/7748yClick Here to Access eBook