Hosono, Kunihiro, ed. <br/><br/>
Photomask and Next-Generation Lithography Mask Technology XVI  [eBook] 

 - Washington, USA  SPIE  2009 
 - Online resource 
 - Proceedings of SPIE; V. 7379 .
<br/><br/><label>ISBN: </label>9780819476562 (Print)