@book{30767,
	author = {Hosono, Kunihiro, ed.},
	title = {Photomask and Next-Generation Lithography Mask Technology XVI},
	publisher = {SPIE},
	year = {2009},
	series = {Proceedings of SPIE; V. 7379},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7379}
}