@book{30766,
	author = {Horiuchi, Toshiyuki, ed.},
	title = {Photomask and Next-Generation Lithography Mask Technology XV},
	publisher = {SPIE},
	year = {2008},
	series = {Proceedings of SPIE; V. 7028},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7028}
}