Kato, Kokoro, ed. <br/><br/>
Photomask and Next-Generation Lithography Mask Technology XIX  [eBook] 

 - Washington, USA  SPIE  2012 
 - Online resource 
 - Proceedings of SPIE; V. 8441 .
<br/><br/><label>ISBN: </label>9780819491367 (Print)