@book{30765,
	author = {Kato, Kokoro, ed.},
	title = {Photomask and Next-Generation Lithography Mask Technology XIX},
	publisher = {SPIE},
	year = {2012},
	series = {Proceedings of SPIE; V. 8441},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/8441}
}