Watanabe, Hidehiro, ed. <br/><br/>
Photomask and Next-Generation Lithography Mask Technology XIV  [eBook] 

 - Washington, USA  SPIE  2007 
 - Online resource 
 - Proceedings of SPIE; V. 6607 .
<br/><br/><label>ISBN: </label>9780819467454 (Print)