@book{30764,
	author = {Watanabe, Hidehiro, ed.},
	title = {Photomask and Next-Generation Lithography Mask Technology XIV},
	publisher = {SPIE},
	year = {2007},
	series = {Proceedings of SPIE; V. 6607},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/6607}
}