00527nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002500092245007600117260003200193300002000225490003300245856010300278IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819463586 (Print)  cIIA Library  aHouga, Morihisa, ed. 0aPhotomask and Next-Generation Lithography Mask Technology XIIIh[eBook]  aWashington, USAbSPIEc2006  aOnline resource  aProceedings of SPIE; V. 6283  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/6283yClick Here to Access eBook