@book{30761,
	author = {Komuro, Masanori, ed.},
	title = {Photomask and Next-Generation Lithography Mask Technology XI},
	publisher = {SPIE},
	year = {2004},
	series = {Proceedings of SPIE; V. 5446},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5446}
}