00526nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002700092245007300119260003200192300002000224490003300244856010300277IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819449962 (Print)  cIIA Library  aTanabe, Hiroyoshi, ed. 0aPhotomask and Next-Generation Lithography Mask Technology Xh[eBook]  aWashington, USAbSPIEc2003  aOnline resource  aProceedings of SPIE; V. 5130  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/5130yClick Here to Access eBook