@book{30760,
	author = {Tanabe, Hiroyoshi, ed.},
	title = {Photomask and Next-Generation Lithography Mask Technology X},
	publisher = {SPIE},
	year = {2003},
	series = {Proceedings of SPIE; V. 5130},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5130}
}