@book{30757,
	author = {Kawahira, Hiroichi, ed.},
	title = {Photomask and Next-Generation Lithography Mask Technology IX},
	publisher = {SPIE},
	year = {2002},
	series = {Proceedings of SPIE; V. 4754},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4754}
}