00501nam a2200145Ia 4500003000900000008004100009020002600050040001600076100001900092245005600111260003200167300002000199490003300219856010300252IN-BaIIA211028s9999 xx s 000 0 eng d a9780819460844 (Print) cIIA Library aMoon, Kee, ed. 0aOptomechatronic Actuators and Manipulationh[eBook] aWashington, USAbSPIEc2005 aOnline resource aProceedings of SPIE; V. 6048 uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/6048yClick Here to Access eBook