00511nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002500092245006000117260003200177300002000209490003300229856010300262IN-BaIIA211028s9999 xx s 000 0 eng d a9780819419019 (Print) cIIA Library aHatheway, Alson, ed. 0aOptomechanical and Precision Instrument Designh[eBook] aWashington, USAbSPIEc1995 aOnline resource aProceedings of SPIE; V. 2542 uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/2542yClick Here to Access eBook