Juha, Libor, ed. <br/><br/>
Optics Damage and Materials Processing by EUV/X-ray Radiation VII  [eBook] 

 - Washington, USA  SPIE  2019 
 - Online resource 
 - Proceedings of SPIE; V. 11035 .
<br/><br/><label>ISBN: </label>9781510627369 (Print) 9781510627376 (Online)