00793nam a2200193Ia 4500003000900000008004100009020002600050020002700076040001600103100003200119245006900151260003200220300002000252490003400272856010400306942000700410999001700417952016500434IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781510634763 (Print)  a9781510634770 (Online)  cIIA Library  ade Groot, Peter, ed.943437 0aOptics and Photonics for Advanced Dimensional Metrologyh[eBook]  aWashington, USAbSPIEc2020  aOnline resource  aProceedings of SPIE; V. 11352  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/11352yClick Here to Access eBook  cEB  c30228d30228  00104070aBANbBANd2011-07-01eSPIEhV. 11352l0pEB9688r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/11352w2021-11-05yEB